|
Tool,
model |
Supervisor |
SOP
or manual |
| UHV
Atomic Layer Deposition system |
L.
Henn-Lecordier |
|
|
UHV programmable multi-segment CVD reactor |
L.
Henn-Lecordier |
|
|
Tube furnace Atomic Layer Deposition reactor |
Erin Robertson |
|
|
Annealing furnace, 1000C, Lindberg |
L.
Henn-Lecordier |
|
| Sopra GES5 spectroscopic ellipsometer, UV-range, automated mapping and variable angle, microspots |
L. Henn-Lecordier |
|
| 4
point probe station for sheet resistance measurements |
L.
Henn-Lecordier |
SOP |
| HP
4145B Semiconductor paramater analyzer |
L.
Henn-Lecordier |
|
|
Agilent E4980A 20Hz-2MHz Precision LCR meter |
L.
Henn-Lecordier |
|
|
Residual gas analyzer, Vision 1000C, MKS, 300 amu CIS |
L.
Henn-Lecordier |
|
| Residual gas analyzer, Inficon
300 amu CIS |
Erin Robertson |
|
| Residual gas analyzer, Inficon
200 amu CIS |
L.
Henn-Lecordier |
|
| Gas phase acoustic sensor,
Inficon Composer |
L. Henn-Lecordier |
|
| FTIR compact spectrometer,
Inficon |
L. Henn-Lecordier |
|
| 8" sol-gel spincoater, SP
100 Bidtec controller |
|
|
| 8" photoresist spincoater,
SP 100 Bidtec controller |
|
|
| Programmable hot plate, 400C;
for sol-gel and photoresist |
|
|
| Programmable furnace, Vulcan
3-550, NEY |
L. Henn-Lecordier |
|
| Oven, Blue M, Electric Gal.
Signal |
L. Henn-Lecordier |
|
| Oven, Lindberg, Electric Gal.
Signal |
L. Henn-Lecordier |
|
| Sartorius A210P
microbalance, 1/10000g |
L. Henn-Lecordier |
|
| Microscope, Ferroscope |
L. Henn-Lecordier |
|
| Microscope, Optiphot POL,
Nikon |
L. Henn-Lecordier |
|
Last updated by L. Henn-Lecordier, February 2004 |
Laboratory for
Advanced Materials Processing