If you need a hardcopy, SOPs and MSDS binders are located on the access door to the clean room. If you notice that a SOP or MSDS is missing, please report as soon as possible to the lab manager.
 

Safety SOPs provided by the Environmental Safety Department

• Chemical Hygiene Plan for compliance with the Occupational Safety and Health Administration (OSHA) regulation "Occupational Exposure to Hazardous Chemicals in Laboratories."

• Online Emergency Response Guide provided by the Department of Environmental Safety listing procedures about emergency, injuries, chemicals spills, fires...

• Hazardous and Regulated Waste Procedures manual: everything you need to know about how to handle and dispose of your waste

• Laboratory Safety Guide provides 90 pages of general guidelines related to the work in a lab.

• More SOPs at DES web site

LAMP General SOPs 

• LAMP general operating procedures and guidelines: these slides are intended to provide general guidelines and procedures when working in the lab. These guidelines are expected to be followed by anyone working in LAMP

LAMP  process SOPs

• Hydrofluoric acid (and HF-based solutions)

• Piranha Solution (acid and base)

• PZT sol-gel deposition processes

• Photoresists

• MAS 400 Mask aligner SOP; MAS 400 manual (pdf-3Mb)

• Automated 4 point probe station for sheet resistance measurement (pdf - 350kB)

LAMP Materials Safety Data Sheets

• Link to LAMP MSDS

Last update: Jan. 2007 by Henn-Lecordier